DAS GmbH DRESDEN - ENVIRONMENTAL EXPERT
DAS - The Waste gas Abatement Specialist
Development, distribution and service of waste gas abatement solutions for semiconductor, FPD and solar cell manufacturers, customised to process requirements with full customer support.
Products and Services
ESCAPEINLINE® Environmentally Safe Cleaning And Protecting Equipment
System for Point-of-Use (PoU) abatement of all semiconductor manufacturing waste gases, which are environmentally harmful, toxic and contaminated. Combination of incineration, scrubbing and monitoring in one single unit.
ESCAPETWIN®
Waste gas abatement system including a second totally independent ESCAPE system for
backup purpose.
ESCAPEDUO
Two ESCAPE systems within one cabinet with simultaneous running made and backup mode.
ESCAPEECO
Costsaving application of waste gas abatement system for flammable and CVD gases
AQUABATE
Compact wet scrubbers designed to scrub waste gases with water or reactive chemicals.
DAS - Monitoring
Software for centralised monitoring and control from one workstation for operation, maintenance and cost management of networked abatement systems.
GIANT
Waste gas Abatement for FPD and Solar Cell Manufacturing
DAS-Customer Services
- Expert technical consultation and cost-of-ownership analysis
- Installation and start-up support
- On-site training of operators/maintenance personnel
- Customised service contracts
- 24hr / 7days customer service
- Efficiency measurements (FTIR)
 
|