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Cygnus®Based on the IC/5 INFICON recently developed the multi-channel controller Cygnus®. It addresses in particular the specific needs of complex OLED deposition processes where the organic material is evaporated from multiple sources all of which have to be controlled individually. The instrument offers 2 independent control channels in the basic version and can be upgraded to a total of 6 channels using optional sensor input cards. |
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The SensorsAll INFICON Quartz crystal sensors utilize plane-convex 6 MHz crystals. Their high quality guarantees smooth and reproducible operation of the INFICON instruments. Frequent feedback from our customers indicates that this is not necessarily the case for the Quartz crystals offered by other vendors.Besides the standard sensor a compact sensor for systems with only limited space is offered. For UHV applications INFICON offer a sensor which can be baked up to 450°C. Furthermore, a sensor for sputter processes is available incorporating a magnetic field to repel energetic electrons. In some very sensitive applications a single sensor would impose a process risk because of its limited lifetime or the always present chance of failure. For those cases INFICON offer two multiple crystal sensors, the dual sensor head and the CrystalSix®. These sensors ensure process safety. In deposition processes with more than one deposition source they may also be used to monitor and control each source with a dedicated sensor crystal. 
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| JCM ist Mitglied der Deutschen Physikalischen Gesellschaft  |
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JCM ist Mitglied der Europäische Forschungsgesellschaft Dünne Schichten e.V.  | |||||||||||||
