Oil diffusion pumps

Small diffusion pumps

Small diffusion pumps are often suitable for evacuating small recipients in analytics, for generating and maintaining isolation vacuums or other tasks where small volumes have to be evacuated. They have good pumping speed for most gases, are robust and inexpensive.
For these applications, HSR offers a model with a DN40ISO-K flange in a water-cooled and an air-cooled version. It has a pumping speed for air/N2 of 22 l/s.

Diffusion pumps with integrated water-cooled baffle

For small coating plants, furnaces, picture tube production and small pumping stations for various applications, HSR manufactures a series of compact oil diffusion pumps with nominal sizes DN63ISO-K - DN250ISO-K. These pumps are each equipped with an integrated water-cooled baffle to minimize oil backflow, thus offering the advantage of small heights. Their nominal pumping speeds (N2), in each case including the integrated baffle, are 150 l/s - 1,750 l/s.

Large diffusion pumps

In the majority of cases, large vapor deposition systems for optics are still equipped with oil diffusion pumps, as these combine a high pumping speed with great robustness and are also inexpensive. In addition, such large diffusion pumps are also used, among other things, for strip coating lines, vacuum metallurgy plants (melting/casting), for electron beam welding systems and for space simulation chambers.
For these applications, HSR offers its series of large diffusion pumps with nominal flange diameters of 320 mm - 1.000 mm. All pumps are available in ISO-K and ISO-F versions. The nominal pumping speeds are 3.500 l/s - 50.000 l/s. When using a baffle, the effective pumping speeds are of course correspondingly lower, depending on the model used. Large vapor deposition systems for optics are in the majority of cases still equipped with oil diffusion pumps, as these combine a high pumping speed with great robustness and are also inexpensive. In addition, such large diffusion pumps are also used, among other things, for strip coating lines, vacuum metallurgy plants (melting/casting), for electron beam welding systems and for space simulation chambers.

Baffles

In order to suppress the backflow of diffusion pump oil and thus contamination of the recipient as far as possible, HSR offers a series of baffles. These baffles are flanged between the diffusion pump and the recipient and the oil vapor diffusing towards the recipient condenses to a large extent on the baffle cold plates. These baffles differ in geometry and in the type of cooling. Depending on the application, water, N2 or a refrigerating machine are used for cooling.

Protective baffles for turbopumps

Protective baffles for turbopumps

Another application for baffles is the protection of turbopumps against an undesirable and possibly damaging coating of the blades with easily condensing material, e.g. Carbon or Indium. These patented protective baffles are flanged between the recipient and the turbopump and have a removable insert with cold plates where the condensation takes place. The cooling of these cold surfaces can again be done with water, N2 or a refrigeration machine. The insert can either be cleaned during the system downtime or replaced with a clean insert to save downtime.