Titanium sublimation pumps for UHV system
Ion getter pumps are often used to evacuate recipients in the deep UHV range (e.g. on ion accelerators). In these pumps, the getter material is sputtered (or atomized, hence ion atomizer pumps) in a diode discharge and "buries" residual gas molecules as it condenses at the intended locations of the pump. Ion getter pumps have a reasonably uniform pumping speed across the mass spectrum, but it is not very high.
In order to provide additional pumping speed during pump-down or in the event of an increase in gas accumulation, a Titanium sublimation pump is often flanged between the UHV pump and the recipient. In this type of pump, material is evaporated (Titanium sublimed) from a (switchable) Titanium filament with the aid of an appropriate power supply and condenses on the walls of the pump housing. Reactive gases, such as O2 and N2, are bound to this active layer to an appreciable extent. As soon as the layer is no longer sufficiently active, i.e. the pumping speed has become too low, a fresh layer is vapor deposited again.
HSR offers a Titanium sublimation unit, on request also in combination with a housing and the matching power supply and control unit PCU-300T.
The housing is available in two different versions. Both have a DN160 CF flange at the top (recipient side). At the bottom (high vacuum pump side) they have either a DN100CF or DN160CF flange. In addition, both versions are equipped with a DN40CF side flange for the sublimation unit. Finally, the housings have an LN2 cold trap in conjunction with the appropriate connections. A filling device is offered as an accessory, with which the cold trap can be operated from a Dewar vessel, or from a central Nitrogen supply.
The Titanium sublimation pump is fully UHV compatible. With appropriate conditioning, its high pumping speed in conjunction with a good, UHV-compatible turbopump allows final pressures in the range of < 10-10 mbar.