Pressure sensors and controllers

Capacity gauges of the SKY® series

These sensors facilitate the pressure dependent deformation of a membrane. The degree of deformation is measured capacitively from the backside. This concept offers the advantage of separating the process volume and the sensor mechanism and electronics.
The SKY® series gauges are available in a number of variants:

  • Total pressure messung (gas type independent)
  • Temperature stabilized at 24 °C/45 °C/100 °C/160 °C/200 °C and thus adaptable to different processes
  • Measurement ranges with maximal pressures of 0.13 mbar - 1.3 bar
  • Vacuum connections as KF, CF, VCR and as 1/2" pipe
  • also as fully ceramic sensor for reactive and corrosive process environments
  • Communication via RS232, DeviceNet or Profibus

Bayard-Alpert/Pirani gauges

The compact gauges of the BPG series, which combine a Bayard-Alpert element (hot cathode ionization gauge) with a Pirani element, enable the measurement of pressures in the range from atmosphere to UHV. They offer themselves as a simple and economical solution for pressure measurement in production vacuum systems.
The most important data are:

    Measuring range: 1000 mb - ca. 5*10-10mbar
    Bayard-Alpert element protected against sudden exposure to atmosphere
    KF or CF flange
    Pressure display on sensor as an option
    Dual filament as an option

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High pressure hot cathode-Pirani gauges

The compact gauges of type HPG400, which combine a high-pressure hot cathode ionization element with a Pirani element, enable the measurement of pressures in the range from atmosphere to the lower high-vacuum range. They are especially suited for precise pressure measurement in the medium pressure range, such as in sputtering processes, where they have their highest accuracy. The most important data are:

  • Measuring range 1000 mbar - ca. 2*10-6 mbar
  • Hot cathode element protected against exposure to atmosphere
  • Pressure display on sensor as an option
  • KF or CF flange

Bayard-Alpert/Pirani/capacitance gauges

The compact combination gauges of the type BCG450, which combine a Bayard-Alpert element with a Pirani and a capacitance element, enable the measurement of pressures in the range from moderate overpressure to UHV. They combine broadband pressure measurement with the function of a pressure switch, which also works at moderate overpressure.
The most important data at a glance:

  •     measuring range 1.5 bar - approx. 5*10-10mbar
  •     precise pressure switching point, independent of atmospheric pressure fluctuations
  •     Bayard-Alpert-element protected against exposure to atmosphere
  •     KF or CF flange
  •     pressure display on sensor as an option

Standard Pirani gauges

The compact gauges of the PSG500 series, equipped with the latest Pirani technology, represent the most cost-effective solution for pressure measurement in the fine vacuum range. The most important data are:

  • Measuring range 1 bar - approx. 5*10-4mbar
  • Nickel filament for corrosive applications as option
  • 2 adjustable switching points as option
  • numerous flange versions, e.g. KF, CF, VCR, NPT
  • PSG550 series with pressure display on the sensor and digital connection

Capacitance-Pirani combination gauges

The compact combination gauges of the PCG550 series, which combine a Pirani element with a capacitance diaphragm element, are suitable for pressure measurement in the range between approx. 10-4 mbar and atmospheric pressure, but especially for the range above 10 mbar. Pressure measurement in load-lock chambers are a typical application.
The most important data are:

  •     Measuring range 1 bar - approx. 5*10-5 mbar
  •     Total pressure measurement (gas type independent) above 10 mbar
  •     connection via DeviceNet and Profibus as an option
  •     numerous flange versions, e.g. KF, CF, VCR, NPT

Penning gauges

Penning gauges type PEG100 represent the most economical and robust solution for pressure measurement high vacuum range.
The most important data are:

  •     measuring range 1*10-2 mbar - 1*10-9 mbar
  •     very good ignition characteristics
  •     connection via DeviceNet and Profibus as an option
  •     KF or CF flange

Inverse magnetron- Pirani-combination gauges

The combination gauges of the type MPG400, which combine a Pirani element with an inverse magnetron element, are suitable for pressure measurement in the entire range between approx. 10-8 mbar and atmospheric pressure. The most important data are:

  • Measuring range 1 bar - 5*10-8 mbar
  • Very good ignition characteristics
  • Connection via DeviceNet and Profibus as option
  • KF or CF flanges

Pressure display VGC501/502/503

The display units VGC501, VGC502 and VGC503 are used to display the measured values of all vacuum gauges from Inficon and also some other manufacturers. These devices differ mainly in the number of measuring channels (1, 2 or 3). Up to 6 switching points with adjustable hysteresis can be selected for each channel. The analog output of each channel can be selected linear or logarithmic.

Display unit for Pirani gauges

The PGD400 display unit is used to operate the PSG500 type gauges. With the help of its analog output, the device can be integrated into a PLC, or the displayed value can be recorded via a recorder.