Accessories

Mechanical feedthroughs

Inficon offers a range of feedthroughs for carrying out sliding and rotary movements into vacuum chambers. These are available in HV and UHV versions.

Electrical feedthroughs

For feeding electrical signals into vacuum chambers, Inficon offers a range of feedthroughs in HV and UHV versions. The product range includes:

  • Coaxial feedthroughs for RF signals, also with multiple connections Feedthroughs for high voltages, also with multiple connections
  • Feedthroughs for high currents, also water-cooled and with multiple connections
  • Feedthroughs for measurement signals, for different numbers of conductors

Vacuum windows

Inficon offers a range of viewing windows for observing processes in vacuum. These viewing windows are available with CF and ISO flanges for HV and UHV applications. In combination with a rotating feedthrough and a matching plate, these windows can also be protected against coating.

Feedthroughs for liquids

Inficon offers two feedthroughs in HV and UHV versions for the feedthrough of liquids into the vacuum. These are suitable for hot and cold liquids, e.g. liquid Nitrogen.

Pressure switches

The pressure switches of types VSA and VSD are used to monitor the pressure in vacuum vessels and switch when a preset pressure threshold is reached. On the one hand, these switches are available as absolute pressure switches, which measure the pressure in the connected volume against the pressure in a sealed reference volume. On the other hand, these switches are available as relative pressure switches that measure against the surrounding atmosphere.

Vacuum ball bearings

For use in vacuum, Inficon offers a range of specially configured ball bearings. These bearings are specified for the temperature range -200 - 300°C and are available for shaft diameters from 4 mm - 12 mm.