Quartz crystal instruments

STM-2

Features:

  • 1 monitor channel, up to 8 STM-2 instruments on one PC
  • LabVIEW and Windows software
  • USB interface
  • Co-deposition monitoring function
  • Built-in oscillator
  • PC required

Suitable for single sensors without shutters

Further Information

SQM-160

Features:

  • 2 monitor channels
  • LabVIEW software
  • Code position monitoring function

Suitable for single and dual sensors with/without shutter

Further Information

IQM-233

Features:

  • 3 monitor channels, 3 control channels
    (up to 6 monitor and control channels in combination with optional IQM-233 + IQS233
  • PCI Express interface)
  • Co deposition control function
  • Windows based software
  • Optional IQS-233 co-deposition software

Suitable for single and double quartz crystal sensors with/without shutter
(shutter operation only in conjunction with optional IQS-233 software)

Further Information

SQM-310 and SQC-310C

Features:

  • 2 monitor channels (4 as an option), 2 control channels (4 as an optio)(SQC-310C: 4 each).
  • Windows software
  • RS232 + USB interface (optionally RS232 + Ethernet)
  • Co-deposition rate control function only with SQC-310C

Suitable for single, double and multiple sensors
(position feedback not possible with multiple sensors)

Further Information

Overview of the Quartz crystal monitors and controllers

Further Information

XTC/3 Thin Film Deposition Controller (XTC/3S Single Layer and XTC/3M Multiple Layer)

Features:

  • ModeLock technology
  • 2 monitor/control channels each
  • RS232 interface (optionally Ethernet)
  • Windows software

Suitable for single, double and multiple sensors

Further Information

IC/6

Features:

  • ModeLock technology
  • Auto-Z function
  • 2 monitor channels (optionally up to 8), up to 6 control channels
  • RS232 interface (optionally Ethernet)
  • Co-deposition control function

Further Information

Cygnus 2

Features:

  • ModeLock technology
  • Auto Z function
  • 2 monitor channels (optionally up to 6), up to 6 control channels
  • RS232 interface (optionally Ethernet)
  • Co-deposition control function

Suitable for single, double and multiple sensors
(position feedback not possible with multiple sensors)

Further Information

Technical service

The service center for Inficon's Quartz crystal instruments is located in Dresden. We will be pleased to offer you the forwarding of your device there.

In addition, we will be happy to advise you in case of questions and problems in connection with the Quartz crystal measurement technology in your coating plant. Finally, we are at your disposal for questions regarding the installation of the sensors in your plant and the integration of the devices into your control system.