Quarz crystal sensors
Standard sensors
For all standard applications:
Sensors without feedthrough, orientation perpendicular or parallel to the water lines
Sensors with feedthrough, adjustable length, orientation perpendicular or parallel to the water lines
Sensor with front loading or side loading (Cool Drawer models)
Further Information
UHV sensors
For applications where lowest pressures or highest cleanliness are required:
Orientation perpendicular or parallel to the water lines
some models adjustable in length before final assembly
mounted on flange DN40CF
also with shutter
Further Information
Vacuum feedthroughs
Multiple sensors
Sometimes it is important for process reliability to have redundant Quartz crystal sensors in the coating plant. There are also cases in which sensors can only be reloaded at very long intervals for plant-related reasons. In still other cases, it makes sense to coat each Quartz with only the same material at a time to increase the precision of the measurement. For all these cases, multiple sensors have been developed, which allow several measuring crystals to be brought into the measuring position one after the other or alternately:
Double sensor for mounting anywhere on the coating line
6-fold sensor for the adjustable mounting in a firmly positioned feed-through, usually in the center of the substrate rotary drive
12-fold sensor for mounting at any place of the coating line
Further Information
Special sensors
For special measurement environments:
Sputtering sensor with built-in deflector for energetic electrons, optimized for plasma processes in general, but especially for sputtering processes
ALD sensor for temperatures up to 450 °C and use in harsh environments
Sensors according to customer specifications on request, e.g. with built-in thermocouple
Further Information